Patented UHP-Canister for CVD- and ALD-precursors.
The electropolished stainless steel canister incorporates three separate vessels into one single canister. The inner one constitutes the vessel for the UHP chemical itself, the second is a reservoir for purge solvent, while the outer section comprises an annular waste tank with an adsorbent layer.
The "drum within a drum" concept eliminates the need for separate canisters for UHP solvent supply and waste collection. Additionally, the TCC canister offers considerable footprint savings, while the 3-wall design ensures unparalleled safety protection.
The TCC canister is optimized for attachment to the TRICHEM chemical delivery systems. Connection of the canister to the TCD's coupling valve block is by means of a failsafe single-screw mechanism. Mechanical coding ensures that the block is correctly aligned, and that only canisters of the designated precursor chemical can be attached to a given delivery cabinet. An integrated, fully automated solvent purging mechanism ensures minimal dead volumes.
TCC canisters are issued with a UN number and are authorized for the transport of hazardous chemical goods. They are also authorized pressure vessels with mandatory recurring examinations.
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